Mechanism of light emission in low energy ion implanted silicon

Keyphrases

• Low-energy Ions 100%
• Light Emission 100%
• Implanted Silicon 100%
• Ion Implantation 100%
• Wafer 100%
• Impurities 50%
• Nanoparticles 25%
• Room Temperature 25%
• Excited States 25%
• Low Energy 25%
• Fluorescence Lifetime Imaging 25%
• Luminescence 25%
• Luminescence Centers 25%
• Crystalline-amorphous 25%
• Silicon Wafer 25%
• Silicon Ions 25%
• Interfacial States 25%
• Defect Centers 25%
• Amorphous Silicon 25%
• Defect States 25%
• Ion Beam 25%
• Crystal Defects 25%

Chemistry

• Silicon 100%
• Implanted Ion 100%
• Fluorescence Lifetime 50%
• Ambient Reaction Temperature 50%
• Luminiscence Type 50%
• Silicon Ion 50%
• Ion Beam 50%
• Crystal Defect 50%
• formation 50%
• Nanoparticle 50%
• Amorphous Silicon 50%

Material Science

• Silicon 100%
• Luminescence 100%
• Nanoparticle 50%
• Silicon Wafer 50%
• Silicon Ion 50%
• Amorphous Silicon 50%
• Crystal Defect 50%