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Mechanism of light emission in low energy ion implanted silicon
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Dive into the research topics of 'Mechanism of light emission in low energy ion implanted silicon'. Together they form a unique fingerprint.
Low-energy Ions
Keyphrases
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Light Emission
Keyphrases
100%
Implanted Silicon
Keyphrases
100%
Ion Implantation
Keyphrases
100%
Wafer
Keyphrases
100%
Silicon
Chemistry
100%
Implanted Ion
Chemistry
100%
Luminescence
Material Science
100%
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